High Vacuum Evaporation Coating System for Semiconductor and Electronics Industry

• Customization: Available
• Warranty: One Year
• Coating: Vacuum Coating
• Substrate: Steel
• Certification: CE, ISO
• Condition: New
• Transport Package: Wooden Case
• Specification: Customized
• Trademark: ACME
• Origin: China
• Production Capacity: 5000

Product Description

Product Description

This equipment is developed by our company for vacuum evaporation deposition of optical thin films, organic thin films and metal thin films. It is particularly suitable for high-tech enterprises, scientific research institutions and universities for film layer research and film system development.

Main technical parameters:

1. Vacuum chamber: 300*300*H450mm; 2. Maximum plateable workpiece diameter: φ100mm, equipped with a pull-out sample table, the sample can be rotated; equipped with a copper substrate sample table;

3. Ultimate vacuum degree: better than 6*10-5Pa; 4. Pumping time: atmospheric pressure ~ 6*10-4Pa less than 30min; 5. Evaporation: resistive evaporation electrode (4 pairs) Power: 2KW; equipped with 2 sets of digital display evaporation power supplies, one of which can be switched to 2 sets of electrodes.

6. Opening method: front door structure, easy to change wires and load materials; 7. Vacuum system: mechanical pump + molecular pump;

8. Film thickness meter: quartz crystal film thickness meter, equipped with a set of water-cooled probes;

9. Water cooling system: The system is equipped with a cooling water circulation system.
 

Item		Specifications and Description
Vacuum Chamber	Evaporation vacuum chamber	300*300*H450mm, the size can be adjusted according to the design requirements, side door
	Molecular pump	Molecular pump 620L/S
	Mechanical pump	BSV30 rotary vane pump, also acts as pre-pump and backing pump
	Baffle valve	DN40 solenoid flapper valve, pre-pumping pipeline on and off
	Stop valve	6mm double ferrule interface electric stop valve
	Lighting and baking device	Optional
	Various types of flanges and observation windows	DN16, 35, 63, 100, 150
	Stainless steel pipelines, pipe joints	Various specifications of precision stainless steel pipes, bellows, pipe joints
Vacuum measurement and air intake	Digital composite vacuum gauge	5227 composite vacuum gauge or imported full-range gauge optional
	Metal bare gauge	ZJ52T, ZJ27 metal interface
	Pipes and connectors	Mixed gas chamber
	Stop valve	6mm double ferrule interface electric stop valve
	Intake and other control interfaces	Manual or electric control
Sample rack	Rotating substrate rack	Substrate rotation, substrate rack lifting
	Lifting device	Lifting manual adjustment or electric lifting
	Substrate heating device	≤600ºC Heating device optional
	Temperature control power supply	Japan Shimaden temperature control, PID temperature control
Evaporation system	Evaporation system	Water-cooled evaporation source, optional 3~4 groups
	Evaporation power supply	8-200A, 2~4 sets
	Equipment rack	Integrated layout
	Water and gas system	Including cooling water machine
	Control system	Standard manual, optional touch screen automatic control

Main technical parameters:

1. Vacuum chamber: φ500*H650mm;

2. Maximum plateable workpiece diameter: φ400mm umbrella-shaped sample holder;

3. Ultimate vacuum degree: better than 6*10-5Pa;

4. Pumping time: atmospheric pressure~6*10-4Pa less than 30min;

5. Evaporation: resistive evaporation electrode (6~8 pairs) Power: 2KW; equipped with 3~4 sets of digital display evaporation power supplies, one of which can be switched to 2 sets of electrodes;

6. Opening method: front door structure, easy to change wire and load;

7. Vacuum system: mechanical pump + molecular pump;

8. Film thickness meter: quartz crystal film thickness meter, equipped with a set of water-cooled probes;

9. Water cooling system: the system is equipped with a cooling water circulation system.

The system is a single vacuum chamber configuration, with a set of 4~6-station electron guns and 2 sets of metal evaporation sources built in. The vacuum chamber size is 500×500×650mm (adjusted appropriately according to design needs). The cavity is made of 304 stainless steel, the inner surface is polished, and the outer surface is shot peened. In order to facilitate experimental operation, a side-opening door is adopted, the exhaust port is rear-placed, and the door is equipped with a glass observation window (including anti-pollution baffle). The coating process is completed in this vacuum chamber. At the same time, considering the needs of system expansion, the required flange interface is reserved.

The electron gun and evaporation electrode are installed on the vacuum bottom plate. The electron gun uses an 8KW power, six-station water-cooled crucible E-type electron gun. Equipped with 2 sets of metal evaporation sources, one set of power supply switching.

The substrate holder adopts a welded bellows + magnetic fluid structure, the sample holder adopts an arched structure, the maximum diameter is 100mm, and the steam distance is 450-550 mm adjustable, which is obtained by deforming the welded bellows. The substrate rotation speed is 3-60 rpm, which is controllable and adjustable (stepper motor control).

In addition, high-pressure bombardment device or ion source assisted deposition system can be selected as needed.

The system is equipped with a film thickness measuring instrument as standard, and a film thickness controller can be optionally equipped to achieve automatic control of the coating process.

   

Company Profile

Our company can provide customers with diversified vacuum coating system design solutions, which can flexibly achieve co-sputtering deposition, multi-layer film deposition, insulating films, and compound film preparation, meeting the requirements of film preparation in various fields. The developed multifunctional evaporation coating machine is widely used in the research and development of OLED and OPV products. On the basis of standard configuration, our company can customize coating machines for specific purposes, portable coating instruments, testing instruments, and non-standard vacuum products according to customer needs.

 

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