Product Description
| Jinan ACME MW1070 MPCVD Machine |
| Vacuum |
Vacuum measurement |
Piezoresistive gauge 0.1-100kpa Capacitance gauge 0-1000Pa |
| Operating pressure range |
4-28Kpa |
| Vacuum leakage rate |
≤ 5 * 10-9Pa.M3/S (He leak detection) |
| Pressure control |
Auto-Control |
| Cavity material |
Aluminum alloy excitation chamber, quartz vacuum chamber |
| Observation window |
Temperature measuring hole with diameter of 10mm and observation window of porous hole |
| Cooling mode |
Cooling mode |
Water cooling+chamber air cooling |
| Sample table size |
Molybdenum stage Φ 70mm, uniform area Φ 50mm |
| Temperature measurement |
Infrared thermometer, range 300-1400 ºC |
| Cooling water flow |
>50L/min |
| Cooling water temperature |
20-22ºC |
| Cooling water interface |
1-inch outer wire interface |
| Operating system |
Operating system |
PLC control, 15 inch touch screen control |
| Process Menu |
10 process menus, 25 lines for each |
| Microwave and power supply |
Microwave frequency |
2.45±0.1GHz |
| Output power |
1.5-7.5Kw (equipped with 10kw domestic microwave power supply) |
| Input power electricity |
380 Ac/50Hz, three-phase five wire (3 * 10+2 * 6 power line),>15Kw |
| Microwave leakage rate |
Microwave leakage rate 5cm away from the equipment ≤ 5Mw/cm2 |
| Process gas |
Flowmeter and interface |
H2 (1000SCCM) CH4 (50SCCM) N2 (10SCCM) O2 (10SCCM) 1/4 "VCR female compressed air 8mm Pu tube quick plug |
| The flowmeter can change the type of gas used through software |
| Air supply pressure |
0.3-0.35MPa |
| Compressed air pressure |
0.5-0.6MPa |
| Vacuum pump |
Rotary vane vacuum pump |
Oil pump |
| Pumping speed |
4L/S |
| Power supply |
Ac 380V(±10%) |
| Interface |
Air extraction KF25, air exhaust KF25 |
| Operating environment |
Ambient temperature and humidity |
The room temperature is lower than 26 ºC and the humidity is lower than 40% |
| Overall dimensions of equipment |
Size |
1250(L)×800(W)×2100(H)mm |
| Equipment appearance |
|
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| Equipment acceptance conditions: |
1. Equipment installation: After the equipment installation is completed, Party A and Party B shall conduct on-site commissioning, and Party B's technicians shall conduct equipment operation, safety and maintenance training for the person in charge of Party A. |
| 2. System test: The system can be started and operated normally, and the detached fireball is stable without jumping. |
| 3. Microwave leakage: the microwave leakage is less than 5mW/cm2 (the output power of the microwave source is more than 80%, 10cm away from the equipment) |
Certifications
Company Profile
ACME is a engineering, manufacturing and consulting company for power products, a world class manufacturer and provider for AC stabilized frequency power supply, variable frequency power supply, Dedicated IF static power supply, DC power supply, inverter power supply, switching power supply (SMPS), 25Hz~1kHz uninterruptible power supply (UPS), emergency power supply (EPS), energy-fed electronic load, reactive power supply and other comprehensive power supply.
Through technical accumulation and talent reserve, the company has trained a team of high-quality management talents and R&D talents. The strong R&D investment makes the products constantly updated to meet the different needs of users.
To be internationally excellent is the goal of the company′s persistent struggle. ACME power products have been widely used in information, home appliances, aviation, aerospace, railway, electric power, telecommunications, petroleum, chemical, coal, finance, securities, radio and television, quality inspection, public security, shipbuilding, medical and health, government agencies, education and other systems and industries, and have a good reputation.
Customer satisfaction is our ultimate goal!
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