3kw Microwave Power Supply for CVD and PVD Systems

• Customization: Available
• Output Type: Single
• Warranty: 1 Year
• Output Power: 6kw
• Input Voltage: 380V
• Connection Mode: Parallel Switching Power Supply
• Starting Mode: Self-excited Switching Power Supply
• Voltage Regulating Mode: Width Modulation Type
• Power Supplying System: Terminal Power Distribution Equipment
• Energy Transmission: Two-way Transmission
• Modulation System: PWM
• Certification: CE, ISO
• Brand: Acme
• Input: 220V/380V
• Input Mode: 1 Phase 2 Wires/3 Phase 4 Wires
• Control Mode: PWM
• Power: 6kw
• Start: Soft Start
• Output Frequency: 2450MHz
• Load Change Rate: 0.5%
• Efficiency: 90%
• Duty Cycle: 0-50%
• DC Output: Pure DC Output
• Auto Reverse: Can Be Set Time
• External Control: RS485/Modbus/RS232
• Working Mode: Cc, Power Limit
• Transport Package: Wood Packing
• Specification: 6kw
• Trademark: ACME
• Origin: Jinan
• HS Code: 8504401990
• Production Capacity: 200PCS/Month

Product Description

Product introduction

This product adopts continuous wave magnetron (Panasonic or Richardson) to realize microwave power of 6kW (microwave frequency 2450±15 MHz) microwave generator. The system is cooled by water, mainly composed of high frequency power supply, MW-Head and MW-System. High frequency power supply includes anode high voltage power supply, filament power supply, magnetic power supply and control system, etc. The MW-Head contains magnetron and excitation cavity, etc.  The microwave system includes Circulator, Coupler, Three-stub tuner, etc.

The microwave generator has two control modes: touchscreen interface and RS485 communication, can adapt different usage needs. The expansion port is reserved, the control function can be added according to actual usage needs.
 

Num	Item	Technical requirement	Remark
1	Input voltage	380V±10%,50Hz±2Hz	Three phase and four wire
2	Microwave output power	≥6kW	Continuous wave
3	Microwave output frequency	2450MHz±15MHz
4	Microwave conversion efficiency	≥65%
5	MW-Power adjust	10%~100% continuous adjustment
6	Flange joint	BJ22/BJ26
7	Control mode	Local control/communication
8	Protection	Filament over current and under current; Anode overpressure and overcurrent; Magnetic field overcurrent; Ignition; Magnetron over-temperature; Water protection; reflection protection
9	Volume	HF-Power supply: 482mm*177mm*556mm M-W Head:200mm*250mm*300mm	W*H*D
10	Usage environment	Work temperature:-10~40ºC Storage temperature:-20~50ºC Humidity:95%no condensation Altitude:<3000m	<0ºC antifreeze required
11	Cooling mode	Water	External supply of equipment, Flow≥2.5L/min

 

Num	Code	Form	Type	Pin	Definition	Characteristic
1	XS1	Terminal block	TD40-01-C	1	A	Power supply
				2	B
				3	C
				4	N
2	XS2	Terminal block	2EDGRKP-5.08/WC-8P	1	VCC	+24V
				2	TEMP	Temperature switch signal
				3	FLOW	Flow switch signal
				4	GND	24VGND
				5	/	/
				6	A1	PC communication
				7	B1
				8	RGND
3	XS3	Terminal block	2EDGRKP-5.08/WC-4P	1	VCC	+24V
				2	GND	24VGND
				3	A2	Function expansion port
				4	B2
4	XS4	Terminal block	2EDGRKP-5.08/WC-2P	1	C+	Magnetic field output+
				2	C-	Magnetic field output-
5	X1	Terminal	JS333(M6 black)	/	HGND	HV-GND
6	X2	Stud	M6(butterfly shape)	/	PE	Safety GND
7	HV	HV- Conductor	White AEG-15kV-2.5mm²	/	FA	Filament output
				/	A	Anode HV-Output
8	IN	Quick screw joint	G1/4-Ø12*8	/	/	Water inlet
9	OUT		G1/4 Ø12*8	/	/	Water outlet

 

Num	Code	Form	Type	Pin	Definition	Characteristic
1	HV	High pressure tightness plug	BL-HV15kV	/	FA	Filament output
			BL-HV15kV	/	A	Anode HV-Output
2	X1	Terminal	JS333(M6 black)	/	HGND	HV-GND
3	X2	Stud	M6(butterfly shape)	/	PE	Safety GND
4	XS1	Terminal block	2EDGRKP-5.08/WC-6P	1	VCC	+24V
				2	TEMP	Temperature switch signal
				3	FLOW	Flow switch signal
				4	GND	24VGND
				5	/	/
				6	/	/
5	IN	Quick screw joint	G1/4-Ø12*8	/	/	Water inlet
6	OUT		G1/4 Ø12*8	/	/	Water outlet
7	/	Flange	BJ26	/	/	MW-Output